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MIL 8000 晶圓檢測(cè)系統(tǒng)

它除了可以用于宏觀(guān)和微觀(guān)檢測(cè)外，也可以作為一晶圓底部檢測(cè)的工具。除此外，它還是一顯微鏡晶圓檢測(cè)系統(tǒng)的進(jìn)樣部件。它擁有目前***的樣品處理系統(tǒng)功能，包括激光配對(duì)，樣品接收選擇和SPC軟件；

大大減少了操作時(shí)間和提高處理較薄晶圓樣品的效率。

此系統(tǒng)，擁有了微觀(guān)和宏觀(guān)晶圓的檢測(cè)功能，也可以對(duì)晶圓底進(jìn)行全景的檢測(cè)。

Proteus Inspection is a compact， table top machine for wafer inspection

It is designed to be a macro and back inspection tool， and to act as a microscope loader for a complete wafer inspection.

The tool is equipped with the most updated handling systems ad features laser mapping， recipe selection and optional SPC software.

This equipment have been designed to fulfill the needs of short cycle times as well as the increasing difficulties due to thin wafers handling.

Such needs required a careful design， based on the state of the art technological solutions for both mechanics and control system.

Proteus Loader， in its fully equipped version， features micro and macro inspection capabilities， including a backside inspection with the full view of wafer bottom.